On the electron energy distribution function in the high power impulse magnetron sputtering discharge
نویسندگان
چکیده
We apply the Ionization Region Model (IRM) and Orsay Boltzmann equation for ELectrons coupled with eXcited states kinetics (OBELIX) model to study electron of a high power impulse magnetron sputtering (HiPIMS) discharge. In IRM bulk (cold) electrons are assumed exhibit Maxwellian energy distribution secondary (hot) electrons, emitted from target surface upon ion bombardment, treated as tail, while in OBELIX is calculated self-consistently using an isotropic equation. The two models merged sense that output used input OBELIX. temporal evolutions particle densities found agree very well between models. Furthermore, good agreement demonstrated bi-Maxwellian by model. It can therefore be concluded assuming distribution, constituting cold group hot group, approximation modeling HiPIMS
منابع مشابه
High power impulse magnetron sputtering discharge
J. T. Gudmundsson, N. Brenning, Daniel Lundin and Ulf Helmersson, High power impulse magnetron sputtering discharge, 2012, Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, (30), 030801. http://dx.doi.org/10.1116/1.3691832 Copyright: American Vacuum Society, This article may be downloaded for personal use only. Any other use requires prior permission of the author and the ...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2021
ISSN: ['1361-6595', '0963-0252']
DOI: https://doi.org/10.1088/1361-6595/abefa8